JPH0748666Y2 - スパッタリング装置 - Google Patents
スパッタリング装置Info
- Publication number
- JPH0748666Y2 JPH0748666Y2 JP1990022025U JP2202590U JPH0748666Y2 JP H0748666 Y2 JPH0748666 Y2 JP H0748666Y2 JP 1990022025 U JP1990022025 U JP 1990022025U JP 2202590 U JP2202590 U JP 2202590U JP H0748666 Y2 JPH0748666 Y2 JP H0748666Y2
- Authority
- JP
- Japan
- Prior art keywords
- target
- annular
- magnetic
- block
- shaped
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004544 sputter deposition Methods 0.000 title claims description 17
- 230000005291 magnetic effect Effects 0.000 claims description 65
- 239000000696 magnetic material Substances 0.000 claims description 22
- 239000003302 ferromagnetic material Substances 0.000 claims description 8
- 150000002500 ions Chemical class 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 4
- 230000005294 ferromagnetic effect Effects 0.000 description 10
- 239000002184 metal Substances 0.000 description 6
- 239000000758 substrate Substances 0.000 description 6
- 229910001220 stainless steel Inorganic materials 0.000 description 4
- 239000010935 stainless steel Substances 0.000 description 4
- 238000001816 cooling Methods 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990022025U JPH0748666Y2 (ja) | 1990-03-05 | 1990-03-05 | スパッタリング装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990022025U JPH0748666Y2 (ja) | 1990-03-05 | 1990-03-05 | スパッタリング装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03115659U JPH03115659U (en]) | 1991-11-29 |
| JPH0748666Y2 true JPH0748666Y2 (ja) | 1995-11-08 |
Family
ID=31525051
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990022025U Expired - Lifetime JPH0748666Y2 (ja) | 1990-03-05 | 1990-03-05 | スパッタリング装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0748666Y2 (en]) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5300066B2 (ja) * | 2009-04-15 | 2013-09-25 | 株式会社昭和真空 | マグネトロンカソード |
| KR20240101688A (ko) * | 2021-12-14 | 2024-07-02 | 닛신덴키 가부시키 가이샤 | 스퍼터링 장치 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02194171A (ja) * | 1989-01-20 | 1990-07-31 | Ulvac Corp | マグネトロンスパッタリング源 |
-
1990
- 1990-03-05 JP JP1990022025U patent/JPH0748666Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH03115659U (en]) | 1991-11-29 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| EXPY | Cancellation because of completion of term |